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karen a reinhardt
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Handbook of silicon wafer cleaning technology
Karen A. Reinhardt, Kern, Werner · William Andrew
718 sayfa · 2008
Silicon-on-insulator technology / Electric insulators and insulation / Semiconductors / Silicium sur isolant / TECHNOLOGY & ENGINEERING
Handbook of cleaning for semiconductor manufacturing
Karen A. Reinhardt, Richard F. Reidy · John Wiley & Sons, Inc.
590 sayfa · 2011
Surfaces / Semiconductors / Cleaning / Physics