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and photon beams 2nd 1984 tarrytown
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Proceedings of the 1984 International Symposium on Electron, Ion, and Photon Beams, 29 May-1 June, 1984, Westchester Marriott Hotel, Tarrytown, New York
International Symposium on Electron, Ion, and Photon Beams (2nd 1984 Tarrytown, N.Y.) · Published for the American Vacuum Society by the American Institute of Physics
463 sayfa · 1985
Congresses / Electron beam Lithography / Etching / Ion beam lithography / Lithography, Electron beam