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Smart sensors, actuators, and MEMS
Jung-Chih Chiao, V. K. Varadan, Carles Cané · SPIE
928 sayfa · 2003
Microelectromechanical systems / Scanning systems / Congresses / Actuators / Detectors
Smart sensors, actuators, and MEMS III
Thomas Becker, Carles Cané · SPIE
Sayfa sayısı yok · 2007
Microelectromechanical systems / Scanning systems / Congresses / Actuators / Detectors
Smart sensors, actuators, and MEMS II
Jung-Chih Chiao, Carles Cané · SPIE
730 sayfa · 2005
Microelectromechanical systems / Congresses / Microtechnology / Actuators / Industrial applications
Smart sensors, actuators, and MEMS IV
Schmid, Ulrich Prof, Carles Cané, Herbert R.. Shea · SPIE
Sayfa sayısı yok · 2009
Microelectromechanical systems / Scanning systems / Congresses / Actuators / Detectors