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r wiegerink
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Mechanical microsensors
M. Elwenspoek, R. Wiegerink · Island Press
301 sayfa · 2000
Silicon / Microelectromechanical systems / Transducers / Micromachining / Detectors
Yazar
1 cilt bulundu.
M. Elwenspoek, R. Wiegerink · Island Press
301 sayfa · 2000
Silicon / Microelectromechanical systems / Transducers / Micromachining / Detectors