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High energy and high dose ion implantation
Symposium C on High Energy Ion Implantation (1991 Strasbourg, France), S. U. Campisano, J. Gyulai, P. L. F. Hemment · Elsevier Science & Technology Books
320 sayfa · 1992
Compound semiconductors / Congresses / Ion bombardment / Ion implantation / Superlattices as materials