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and low k interlevel dielectrics 2000 phoenix
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Cilt sonuçları
Copper interconnects, new contact metallurgies/structures, and low-k interlevel dielectrics
Symposium on Copper Interconnects, New Contact Metallurgies/Structures, and Low-k Interlevel Dielectrics (2000 Phoenix, Ariz.) · Electrochemical Society
224 sayfa · 2001
Congresses / Copper / Dielectric films / Electroplating / Integrated circuits