Yazar
g s oehrlein
2 cilt bulundu.
Cilt sonuçları
Advanced etch technology for nanopatterning
Ying Zhang, G. S. Oehrlein, Qinghuang Lin · SPIE
Sayfa sayısı yok · 2012
Lithography / Congresses / Plasma etching
Materials, Technology and Reliability for Advanced Interconnects and Low-K Dielectrics
G. S. Oehrlein, K. Maex, S. Ogawa, J. T. Wetzel, Y. -C Joo · University of Cambridge ESOL Examinations
614 sayfa · 2014
Semiconductors / Integrated circuits / Thin films