m elwenspoek

M. Elwenspoek, M. Elwenspoek, H. V. Jansen · Cambridge University Press

413 sayfa · 1998

Silicon / Micromachining / Etching / Electronic devices & materials / Technology

M. Elwenspoek, R. Wiegerink · Springer

301 sayfa · 2000

Silicon / Microelectromechanical systems / Transducers / Micromachining / Detectors

M. Elwenspoek, H. V. Jansen · Cambridge University Press

419 sayfa · 2004

Semiconductors / Silicon / Etching, technique

M. Elwenspoek, Ernst Obermeier, H. Fujita · Materials Research Society

242 sayfa · 1997

Materials, research / Measure theory / Materials / Optical films / Electromechanical devices